Channel chip

ABSTRACT

A channel chip having a channel for running a fluid that is opened and closed by sliding on a film a sliding member slidable on the film while contacting with the film, the channel chip comprising: a substrate including a first channel, a second channel and a partition wall formed between the first channel and the second channel; a film including a diaphragm having a substantially spherical crown shape, the film being disposed on the substrate so that the diaphragm faces the partition wall; and a positioning section for holding the sliding member in such a way that the sliding member is slidable on the film while the positioning section positions the sliding member, the positioning section being disposed on the film.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/324,179, filed on Feb. 8, 2019, which is National Stage Applicationof International Application No. PCT/JP2017/028175, filed on Aug. 3,2017, the disclosure of which, including the specification, drawings andabstract, is incorporated herein by reference in their entirety.International Application No. PCT/JP2017/028175 is entitled to andclaims the benefit of Japanese Patent Application No. 2016-155851, filedon Aug. 8, 2016, and Japanese Patent Application No. 2017-056601, filedon Mar. 22, 2017, the disclosures of which, including thespecifications, drawings and abstracts, are incorporated herein byreference in their entirety.

TECHNICAL FIELD

The present invention relates to a fluid handling device, a fluidhandling method and a channel chip.

BACKGROUND ART

In recent years, fluid handling devices are used for accurately andspeedily analyzing a trace amount of a substance, such as a protein or anucleic acid. Fluid handling devices have an advantage in that only asmall amount of a reagent or a sample is required for analysis, and thusare expected to be used for various applications, such as clinicalexaminations, food tests, and environment tests. As an example of suchfluid handling devices, known is a fluid handling device that can openand close a channel thereof by using a rotary member capable of rotation(see, for example, PTL 1).

A fluid handling device described in PTL 1 includes a reactioncontainer, a first channel connected to the reaction container at oneend thereof, a sealing container, a second channel connected to thesealing container at one end thereof, a syringe for sending liquid, anda switch valve for connecting the syringe to the first or secondchannel. The switch valve in the fluid handling device described in PTL1 is a rotary member that is roratable, and the rotation of the switchvalve can connect the syringe to the first or second channel via achannel in the switch valve.

CITATION LIST Patent Literature

-   PTL1-   Japanese Patent Application Laid-Open No. 2010-008217

SUMMARY OF INVENTION Technical Problem

In the fluid handling device described in PTL 1, the rotary memberslides on a base material constituting the channel of the fluid handlingdevice during the rotation of the rotary member, thereby wearing downthe base material.

An object of the present invention is to provide a fluid handling deviceand a channel chip, in both of which a base material constituting achannel is not worn down by a member for opening and closing the channelwhen the member is operated. Another object of the present invention isto provide a fluid handling method that uses the fluid handling device.

Solution to Problem

A channel chip of the present invention is a channel chip having achannel for running a fluid that is opened and closed by sliding on afilm a sliding member slidable on the film while contacting with thefilm. The channel chip includes: a substrate including a first channel,a second channel and a partition wall formed between the first channeland the second channel; a film including a diaphragm having asubstantially spherical crown shape, the film being disposed on thesubstrate so that the diaphragm faces the partition wall; and apositioning section for holding the sliding member in such a way thatthe sliding member is slidable on the film while the positioning sectionpositions the sliding member, the positioning section being disposed onthe film.

Advantageous Effects of Invention

The present invention can provide a fluid handling device and a channelchip which can be used for long period of time as a base materialconstituting a channel is not worn down by a member when the member isoperated for opening and closing the channel.

BRIEF DESCRIPTION OF DRAWINGS

FIGS. 1A and 1B illustrate a configuration of a fluid handling deviceaccording to Embodiment 1;

FIGS. 2A and 2B illustrate a configuration of a substrate having a firstfilm joined thereto in Embodiment 1;

FIGS. 3A to 3C illustrate a configuration of a positioning sectionhaving a second film joined thereto in Embodiment 1;

FIGS. 4A to 4C illustrate a configuration of a rotary member accordingto Embodiment 1;

FIGS. 5A and 5B are diagrams for describing a fluid handling methodaccording to Embodiment 1;

FIGS. 6A and 6B are diagrams for describing the fluid handling methodaccording to Embodiment 1;

FIGS. 7A and 7B illustrate a configuration of a fluid handling deviceaccording to Embodiment 2;

FIGS. 8A to 8C illustrate a configuration of a channel chip according toEmbodiment 2;

FIGS. 9A to 9C illustrate a configuration of a rotary member accordingto Embodiment 2;

FIGS. 10A to 10C illustrate a configuration of a channel chip accordingto Embodiment 3;

FIGS. 11A to 11C illustrate a configuration of a channel chip accordingto Embodiment 4;

FIGS. 12A and 12B illustrate a configuration of a fluid handling deviceaccording to Embodiment 5;

FIGS. 13A to 13C illustrate a configuration of a channel chip accordingto Embodiment 5;

FIGS. 14A to 14C illustrate a configuration of a rotary member accordingto Embodiment 5;

FIGS. 15A to 15F are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to Embodiment 5;

FIGS. 16A to 16E are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to a modification of Embodiment 5;

FIGS. 17A to 17C illustrate a configuration of a rotary member accordingto Embodiment 6;

FIGS. 18A to 18F are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to Embodiment 6;

FIGS. 19A to 19C illustrate a configuration of a fluid handling deviceor channel chip according to Embodiment 7;

FIGS. 20A to 20C illustrate a configuration of a rotary member accordingto Embodiment 7;

FIGS. 21A to 21F are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to Embodiment 7;

FIG. 22 illustrates a configuration of a channel chip according toEmbodiment 8;

FIGS. 23A and 23B are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to Embodiment 8;

FIGS. 24A and 24B illustrate a configuration of a fluid handling deviceaccording to Embodiment 9;

FIGS. 25A to 25C illustrate a configuration of a fluid handling deviceaccording to Embodiment 10;

FIGS. 26A to 26C illustrate a configuration of a channel chip accordingto Embodiment 10; and

FIGS. 27A to 27C illustrate a configuration of a channel chip accordingto Embodiment 11.

DESCRIPTION OF EMBODIMENTS

Embodiments of the present invention will be described in detail belowwith reference to the accompanying drawings.

Embodiment 1

(Configuration of fluid handling device) FIGS. 1A and 1B illustrate aconfiguration of fluid handling device 100 according to the presentembodiment. FIG. 1A is a plan view of fluid handling device 100, andFIG. 1B is a front view of fluid handling device 100.

Fluid handling device 100 according to the present embodiment includeschannel chip 110 and rotary member 160. Channel chip 110 includessubstrate 120, first film 130, positioning section 140 for rotary member160 and second film 150 (see FIGS. 3A to 3C below). Channel chip 110includes a channel for running a fluid therethrough, such as a reagent,a liquid sample or a gas. A part of first film 130 functions as adiaphragm (valve body) for opening and closing the channel.

FIGS. 2A and 2B illustrate a configuration of substrate 120 having firstfilm 130 joined thereto. FIG. 2A is a plan view of substrate 120 havingfirst film 130 joined thereto, and FIG. 2B is a cross-sectional viewtaken along line B-B shown in FIG. 2A.

Channel chip 110 includes fluid inlets 121 a and 121 b, first channels122 a and 122 b, first partition walls 123 a and 123 b, second channel124, second partition walls 125 a and 125 b, third channels 126 a and126 b, and fluid outlets 127 a and 127 b. Substrate 120 has a grooveand/or recess formed therein as appropriate within a range that canobtain the effect of the present embodiment. Herein, a channel connectedto the upstream side of each partition wall corresponds to “firstchannel” in the claims, and a channel connected to the downstream sideof each partition wall corresponds to “second channel” in the claims.

Substrate 120 may have any thickness. For example, the thickness ofsubstrate 120 is 1 mm or more and 10 mm or less. The material ofsubstrate 120 may be selected from resins and glass known in the art asappropriate. Examples of the materials of substrate 120 includepolyethylene terephthalate, polycarbonate, polymethylmethacrylate,polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene,silicone resins, and elastomers.

Each of fluid inlets 121 a and 121 b is a bottomed recess formed insubstrate 120. Each of fluid inlets 121 a and 121 b communicates withthe outside via a through hole provided in first film 130. In fluidhandling device 100, fluids are introduced into channel chip 110 fromfluid inlets 121 a and 121 b. The fluid introduced from fluid inlet 121a may be the same as or different from the fluid introduced from fluidinlet 121 b.

Fluid inlets 121 a and 121 b may have any shapes or sizes, and may beappropriately designed as necessary. Fluid inlets 121 a and 121 b have,for example, a substantially cylindrical shape. The width of each offluid inlet 121 a and 121 b is, for example, about 2 mm. Fluid inlet 121a and fluid inlet 121 b may have the same shape and size, or differentshapes and sizes. In the present embodiment, fluid inlet 121 a and fluidinlet 121 b have the same shape and size.

First channel 122 a is a channel where a fluid introduced from fluidinlet 121 a flows. Fluid inlet 121 a is disposed at the upstream end offirst channel 122 a, and first partition wall 123 a is disposed at thedownstream end of first channel 122 a.

First channel 122 b is a channel where a fluid introduced from fluidinlet 121 b flows. Fluid inlet 121 b is disposed at the upstream end offirst channel 122 b, and first partition wall 123 b is disposed at thedownstream end of first channel 122 b.

Each of first channels 122 a and 122 b is, for example, a groove whoseopening is blocked with another member, such as a film. In the presentembodiment, first channels 122 a and 122 b are formed by blocking theopenings of grooves formed in substrate 120 with first film 130.

The cross-sectional areas and the cross-sectional shapes of firstchannels 122 a and 122 b are not limited. As used herein, “cross sectionof a channel” is a cross section of a channel orthogonal to the flowdirection of a fluid. First channels 122 a and 122 b each have, forexample, a substantially rectangular cross-sectional shape with eachside (width and depth) of about several tens of micrometers. Thecross-sectional areas of first channels 122 a and 122 b may or may notremain constant along the fluid flow direction. In the presentembodiment, the cross-sectional area of first channel 122 a becomeslarger in a downstream-end portion thereof as the distance to thedownstream end of first channel 122 a become shorter. The shape of thedownstream-end portion of first channel 122 a in plan view may bedetermined in accordance with the shape of diaphragm 131 a of first film130. In the present embodiment, the end portion of first channel 122 ahas a semicircular shape in plan view. Because the end portion of firstchannel 122 a has a shape in accordance with that of diaphragm 131 a,diaphragm 131 a deforms in accordance with the semicircular shape formedin the end portion of first channel 122 a when the channel is closed bybringing diaphragm 131 a into contact with first partition wall 123 a. Agap thus is not formed between first film 130 and the surface ofsubstrate 120. This prevents a liquid from seeping into a gap.

The cross-sectional area of first channel 122 b and the shape of thedownstream-end portion of first channel 122 b in plan view may be set inthe same manner as with first channel 122 a, and thus the descriptionsthereof are omitted. In the present embodiment, the downstream-endportion of first channel 122 b also has a semicircular shape in planview.

First channel 122 a and first channel 122 b may have the samecross-sectional area and cross-sectional shape, or differentcross-sectional areas and cross-sectional shapes. In the presentembodiment, first channel 122 a and first channel 122 b have the samecross-sectional area and cross-sectional shape.

First partition wall 123 a is formed between the downstream end of firstchannel 122 a and one of the upstream ends of second channel 124. Firstpartition wall 123 b is formed between the downstream end of firstchannel 122 b and the other upstream end of second channel 124.

As will be described in detail below, each of first partition walls 123a and 123 b functions as a valve seat of a microvalve for opening andclosing a channel. First partition walls 123 a and 123 b may have anyshape or height as long as the above function can be achieved. Firstpartition walls 123 a and 123 b are, for example, in a shape of aquadrangular prism. The height of each of first partition wall 123 a and123 b is, for example, the same as the depth of a groove formed insubstrate 120 (i.e., the height of a channel). First partition wall 123a and first partition wall 123 b may have the same shape and height, ordifferent shapes and heights. In the present embodiment, first partitionwall 123 a and first partition wall 123 b have the same shape andheight.

Second channel 124 includes two upstream-end portions and twodownstream-end portions. Second channel 124 is a channel where fluidscoming from two first channels 122 a and 122 b flow. More specifically,fluids coming from two first channels 122 a and 122 b flow in secondchannel 124 via respective gaps between substrate 120 and first film 130(i.e., a gap between first partition wall 123 a and diaphragm 131 a, anda gap between first partition wall 123 b and diaphragm 131 b).

First partition wall 123 a is disposed at one of the upstream ends ofsecond channel 124, and second partition wall 125 a is disposed at oneof the downstream ends of second channel 124. First partition wall 123 bis disposed at the other upstream end of second channel 124, and secondpartition wall 125 b is disposed at the other downstream end of secondchannel 124. Second channel 124 is, for example, a groove whose openingis blocked with another member, such as a film. In the presentembodiment, second channel 124 is formed by blocking the opening of agroove formed in substrate 120 with first film 130.

The cross-sectional area and the cross-sectional shape of second channel124 are not limited. Second channel 124 has, for example, asubstantially rectangular cross-sectional shape with each side (widthand depth) of about several tens of micrometers. The cross-sectionalarea of second channel 124 may or may not remain constant along thefluid flow direction. In the present embodiment, the cross-sectionalarea of second channel 124 becomes larger in a upstream-end portionthereof as the distance to the upstream end of second channel 124 becomeshorter, and also becomes larger in a downstream-end portion thereof asthe distance to the downstream end of second channel 124 become shorter.Regarding second channel 124, the shapes of the upstream-end portionsand downstream-end portions in plan view are respectively in accordancewith the shapes of diaphragms 131 a to 131 d of first film 130. In thepresent embodiment, as with the downstream-end portions of firstchannels 122 a and 122 b in plan view, each of four end portions (twoupstream-end portions and two downstream-end portions) of second channel124 also has a semicircular shape in plan view.

Second partition wall 125 a is formed between the downstream end ofsecond channel 124 and the upstream end of third channel 126 a. Secondpartition wall 125 b is formed between the downstream end of secondchannel 124 and the upstream end of third channel 126 b.

As will be described in detail below, each of second partition walls 125a and 125 b also functions as a valve seat of a microvalve for openingand closing a channel. Second partition walls 125 a and 125 b may haveany shape or height as long as the above function can be achieved. Theheight of each of second partition wall 125 a and 125 b is, for example,the same as the depth of a groove formed in substrate 120 (i.e., theheight of a channel). Second partition walls 125 a and 125 b are, forexample, in a shape of a quadrangular prism. Second partition wall 125 aand second partition wall 125 b may have the same shape and height, ordifferent shapes and heights. In the present embodiment, secondpartition wall 125 a and second partition wall 125 b have the same shapeand height.

Third channel 126 a is a channel where a fluid coming from one of thedownstream ends of second channel 124 flows. More specifically, a fluidcoming from one of the downstream ends of second channel 124 via a gapbetween substrate 120 and first film 130 (i.e., a gap between secondpartition wall 125 a and diaphragm 131 c) flows in third channel 126 a.Second partition wall 125 a is disposed at the upstream end of thirdchannel 126 a, and fluid outlet 127 a is disposed at the downstream endof third channel 126 a.

Third channel 126 b is a channel where a fluid coming from the otherdownstream end of second channel 124 flows. More specifically, a fluidcoming from the other downstream end of second channel 124 via a gapbetween substrate 120 and first film 130 (i.e., a gap between secondpartition wall 125 b and diaphragm 131 d) flows in third channel 126 b.Second partition wall 125 b is disposed at the upstream end of thirdchannel 126 b, and fluid outlet 127 b is disposed at the downstream endof third channel 126 b.

Each of third channels 126 a and 126 b is, for example, a groove whoseopening is blocked with another member, such as a film. In the presentembodiment, third channels 126 a and 126 b are formed by blocking theopenings of grooves formed in substrate 120 with first film 130.

The cross-sectional areas and the cross-sectional shapes of thirdchannels 126 a and 126 b are not limited. Third channels 126 a and 126 beach have, for example, a substantially rectangular cross-sectionalshape with each side (width and depth) of about several tens ofmicrometers. The cross-sectional areas of third channels 126 a and 126 bmay or may not remain constant along the fluid flow direction. In thepresent embodiment, the cross-sectional area of third channel 126 abecomes larger in a upstream-end portion thereof as the distance to theupstream end of third channel 126 a become shorter. The shape of theupstream-end portion of third channel 126 a in plan view is inaccordance with the shape of diaphragm 131 c of first film 130. In thepresent embodiment, as with the downstream-end portions of firstchannels 122 a and 122 b, the upstream-end portion of third channel 126a also has a semicircular shape in plan view.

The cross-sectional area of third channel 126 b and the shape of thedownstream-end portion of third channel 126 b in plan view may be set inthe same manner as with first channel 122 a, and thus the descriptionsthereof are omitted. In the present embodiment, the upstream-end portionof third channel 126 b also has a semicircular shape in plan view.

Third channel 126 a and third channel 126 b may have the samecross-sectional area and cross-sectional shape, or differentcross-sectional areas and cross-sectional shapes. In the presentembodiment, third channel 126 a and third channel 126 b have the samecross-sectional area and cross-sectional shape.

First channels 122 a and 122 b, second channel 124, and third channels126 a and 126 b may have the same cross-sectional area andcross-sectional shape, or different cross-sectional areas andcross-sectional shapes. In the present embodiment, first channels 122 aand 122 b, second channel 124, and third channels 126 a and 126 b havethe same cross-sectional area and cross-sectional shape.

Each of fluid outlets 127 a and 127 b is a bottomed recess formed insubstrate 120. Each of fluid outlets 127 a and 127 b communicates withthe outside via a through hole provided in first film 130. In fluidhandling device 100, fluids are taken out from fluid outlets 127 a and127 b. Fluid outlets 127 a and 127 b may have any shapes or sizes, andmay be appropriately designed as necessary. Fluid outlets 127 a and 127b have, for example, a substantially cylindrical shape. The width ofeach of fluid outlet 127 a and 127 b is, for example, about 2 mm. Fluidoutlet 127 a and fluid outlet 127 b may have the same shape and size, ordifferent shapes and sizes. In the present embodiment, fluid outlet 127a and fluid outlet 127 b have the same shape and size.

First film 130 is a flexible film. In the present embodiment, first film130 has four through holes formed at positions corresponding to fluidinlets 121 a and 121 b, and fluid outlets 127 a and 127 b, respectively.First film 130 also includes four diaphragms 131 a to 131 d each in asubstantially spherical crown shape. First film 130 is disposed onsubstrate 120 so that diaphragm 131 a faces first partition wall 123 a,diaphragm 131 b faces first partition wall 123 b, diaphragm 131 c facessecond partition wall 125 a, and diaphragm 131 d faces second partitionwall 125 b.

In the present embodiment, first film 130 is disposed on substrate 120so that diaphragms 131 a to 131 d each in a substantially sphericalcrown shape protrude away from substrate 120, and the openings ofdiaphragms 131 a to 131 d face partition walls (i.e., first partitionwalls 123 a and 123 b, and second partition walls 125 a and 125 b,respectively). More specifically, diaphragm 131 a faces a first facingregion composed of the downstream-end portion of first channel 122 a,first partition wall 123 a, and one of the upstream-end portions ofsecond channel 124. Diaphragm 131 b faces a second facing regioncomposed of the downstream-end portion of first channel 122 b, firstpartition wall 123 b, and the other upstream-end portion of secondchannel 124. Diaphragm 131 c faces a third facing region composed of oneof the downstream-end portions of second channel 124, second partitionwall 125 a, and the upstream-end portion of third channel 126 a.Diaphragm 131 d faces a fourth facing region composed of the otherdownstream-end portion of second channel 124, second partition wall 125b, and the upstream-end portion of third channel 126 b.

The center of each of diaphragms 131 a to 131 d may or may not bepositioned above the corresponding partition wall. In the presentembodiment, the center of each of diaphragms 131 a to 131 d ispositioned above the corresponding partition wall. That is, the centersof diaphragm 131 a, diaphragm 131 b, diaphragm 131 c and diaphragm 131 dare respectively positioned above first partition wall 123 a, firstpartition wall 123 b, second partition wall 125 a and second partitionwall 125 b.

Diaphragms 131 a to 131 d of first film 130 are not joined to substrate120. Further, diaphragms 131 a to 131 d are bendable towardcorresponding partition walls when pressed by protrusion 161 a or 161 b(described below) of rotary member 160.

As will be described in detail below, a channel is opened or closed byseparating each of diaphragms 131 a to 131 d from the correspondingpartition wall, or contacting the diaphragm to the partition wall. Thesize of each of diaphragms 131 a to 131 d in plan view may beappropriately set in accordance with the width of the channel, the sizeof the partition wall, and/or the like so that diaphragms 131 a to 131 dcan each function as a diaphragm (valve body) of a microvalve foropening and closing the channel. Four diaphragms 131 a to 131 d may havethe same size or different sizes. In the present embodiment, fourdiaphragms 131 a to 131 d have the same size.

The size of each of diaphragms 131 a to 131 d may be the same as, largerthan, or smaller than that of the corresponding facing region (i.e.,first facing region, second facing region, third facing region or fourthfacing region). In the present embodiment, the size of each ofdiaphragms 131 a to 131 d is larger than that of the correspondingfacing region (see FIG. 2A). By employing diaphragms 131 a to 131 dlarger than the corresponding facing regions, diaphragms 131 a to 131 dcan be suitably brought into contact with corresponding partition wallseven when a gap is generated between a plane including a contact surface(namely a surface where each of diaphragms 131 a to 131 d contacts thecorresponding partition wall), and first film 130 (see FIG. 6B below).

The distance from each of diaphragms 131 a to 131 d to the correspondingpartition wall may be adjusted as appropriate, for example, from theview point of the flow rate of a desired fluid, and how well diaphragms131 a to 131 d can adhere to the corresponding partition walls. A longerdistance enables easier movement of a fluid through the gap betweensubstrate 120 and first film 130, and a shorter distance enables easieradhesion of diaphragms 131 a to 131 d to the corresponding partitionwalls.

The material of first film 130 may be selected from resins known in theart as appropriate. Examples of the materials of first film 130 includepolyethylene terephthalate, polycarbonate, polymethylmethacrylate,polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene,silicone resins, and elastomers.

FIGS. 3A to 3C illustrate a configuration of positioning section 140having second film 150 joined thereto. FIG. 3A is a plan view ofpositioning section 140 having second film 150 joined thereto, FIG. 3Bis a side view thereof, and FIG. 3C is a cross-sectional view takenalong line C-C in FIG. 3A. FIGS. 4A to 4C illustrate a configuration ofrotary member 160. FIG. 4A is a plan view of rotary member 160, FIG. 4Bis a side view thereof, and FIG. 4C is a cross-sectional view takenalong line C-C in FIG. 4A.

Positioning section 140 is fixed on first film 130. Positioning section140 holds rotary member 160 so that rotary member 160 is rotatable whilepositioning section 140 positions rotary member 160. Positioning section140 may have any shape or size as long as the above function can beachieved. Positioning section 140 is, for example, a frame for rotatablyholding rotary member 160, or a protrusion disposed on the rotation axisof rotary member 160. In the present embodiment, positioning section 140is a frame including a through hole. On the inner wall of positioningsection 140, step 141 for positioning rotary member 160 at apredetermined height is formed.

Positioning section 140 may be fixed to first film 130 or to substrate120. In the present embodiment, positioning section 140 is fixed tofirst film 130. Any method may be employed for fixing positioningsection 140 to first film 130, and for example, positioning section 140may be bond to first film 130.

Second film 150 is a flexible film. Second film 150 is immovablydisposed between first film 130 and rotary member 160. In the presentembodiment, second film 150 is joined to positioning section 140 to bedisposed between first film 130 and rotary member 160 so that secondfilm 150 does not rotate.

The material of second film 150 may be selected from resins and rubberknown in the art as appropriate Examples of the materials of second film150 include polyethylene terephthalate, polycarbonate,polymethylmethacrylate, polyvinyl chloride, polypropylene, polyether,polyethylene, polystyrene, silicone resins, and elastomers. Forincreasing the slidability between second film 150 and rotary member160, polyethylene is preferred as the material of second film 150. Forincreasing the slidability between second film 150 and rotary member160, coating treatment that increases slidability may also be performedon the surface of second film 150. In addition, for easier closing ofthe gaps between diaphragms 131 a to 131 d and the respective partitionwalls (i.e., first partition walls 123 a and 123 b, and second partitionwalls 125 a and 125 b), a rubber film is preferred as the material ofsecond film 150.

Rotary member 160 is disposed, with its underside facing first film 130,on first film 130. In the present embodiment, rotary member 160 isdisposed in a frame, namely positioning section 140. Rotary member 160is thus positioned to be rotatable by positioning section 140 at apredetermined position on first film 130. In the present embodiment,notch 162 whose shape corresponds to that of step 141 of positioningsection 140 is formed on the underside of rotary member 160. Rotarymember 160 may further include handle 163 for rotating rotary member160. Handle 163 may have any shape, such as a shape of a quadrangularprism.

In the present embodiment, two protrusions 161 a and 161 b are formed onthe underside of rotary member 160. Rotary member 160 can rotate aboutthe normal line of the underside. As will be described in detail below,the rotation of rotary member 160 opens or closes a channel. In thepresent embodiment, rotary member 160 can alternately switch betweenbelow-described first state and second state (select the first state orsecond state), by the rotation thereof.

Rotary member 160 has a certain level of weight and rigidity forpressing diaphragms 131 a to 131 d by protrusions 161 a and 161 b toadhere each of diaphragms 131 a to 131 d to the corresponding partitionwall. Any material may be selected for rotary member 160 from materialsknown in the art as appropriate. Examples of the materials of rotarymember 160 include resins, rubber and metals. For increasing theslidability of rotary member 160 relative to positioning section 140 andsecond film 150, polyethylene is preferred as the material of rotarymember 160, for example. In addition, coating treatment that increasesslidability of rotary member 160 to positioning section 140 and secondfilm 150 may also be performed on the surface of rotary member 160.

In the present embodiment, in a first state, a fluid introduced intochannel chip 110 from fluid inlet 121 a can flow to fluid outlet 127 avia first channel 122 a, second channel 124 and third channel 126 a. Inthe first state, two protrusions 161 a and 161 b are disposed so thatneither of the two protrusions faces first partition wall 123 a withdiaphragm 131 a therebetween, and neither of the two protrusions facessecond partition wall 125 a with diaphragm 131 c therebetween. In thefirst state, first channel 122 a communicates with second channel 124via the gap between diaphragm 131 a and first partition wall 123 a, andsecond channel 124 communicates with third channel 126 a via the gapbetween diaphragm 131 c and second partition wall 125 a.

On the other hand, in the first state, two protrusions 161 a and 161 bare disposed so that one of the two protrusions faces first partitionwall 123 b with diaphragm 131 b therebetween, and the other one of thetwo protrusions faces second partition wall 125 b with diaphragm 131 dtherebetween. Accordingly, diaphragm 131 b is pressed by one ofprotrusions 161 a and 161 b to come into contact with first partitionwall 123 b, and diaphragm 131 d is pressed by the other one ofprotrusions 161 a and 161 b to come into contact with second partitionwall 125 b. In the first state, first channel 122 b does not communicatewith second channel 124, and second channel 124 does not communicatewith third channel 126 b.

In the present embodiment, in a second state, a fluid introduced intochannel chip 110 from fluid inlet 121 b can flow to fluid outlet 127 bvia first channel 122 b, second channel 124 and third channel 126 b. Inthe second state, two protrusions 161 a and 161 b are disposed so thatone of the two protrusions faces first partition wall 123 a withdiaphragm 131 a therebetween, and the other one of the two protrusionsfaces second partition wall 125 a with diaphragm 131 c therebetween.Accordingly, diaphragm 131 a is pressed by one of protrusions 161 a and161 b to come into contact with first partition wall 123 a, anddiaphragm 131 c is pressed by the other one of protrusions 161 a and 161b to come into contact with second partition wall 125 a. In the secondstate, first channel 122 a does not communicate with second channel 124,and second channel 124 does not communicate with third channel 126 a.

On the other hand, in the second state, two protrusions 161 a and 161 bare disposed so that neither of the two protrusions faces firstpartition wall 123 b with diaphragm 131 b therebetween, and neither ofthe two protrusions faces second partition wall 125 b with diaphragm 131d therebetween. Accordingly, first channel 122 b communicates withsecond channel 124 via the gap between diaphragm 131 b and firstpartition wall 123 b, and second channel 124 communicates with thirdchannel 126 b via the gap between diaphragm 131 d and second partitionwall 125 b.

The shape, number and size of protrusions 161 a and 161 b are notlimited as long as the above function can be achieved. As used herein,“protrusion” is a part of the underside of rotary member 160, and thepart can press diaphragms 131 a to 131 d so that the diaphragms comeinto contact with the partition walls. Protrusions 161 a and 161 b maybe a protruding part formed on the underside of rotary member 160, orwhen a recess is formed in the underside of rotary member 160, a partother than the recess. In the present embodiment, two protrusions 161 aand 161 b are projected lines extending along the rotation direction ofrotary member 160. Two protrusions 161 a and 161 b are separated fromeach other. The distance between two protrusions 161 a and 161 b in thecircumferential direction of rotary member 160 is, for example, the sameas or larger than the size of each of diaphragms 131 a to 131 d in planview.

Fluid handling device 100 can be produced by, for example, fixingpositioning section 140 having second film 150 joined thereto, onsubstrate 120 having first film 130 joined thereto, followed bydisposing rotary member 160 in positioning section 140. Any method maybe selected from methods known in the art as appropriate for fixingsubstrate 120 and first film 130 to each other, and second film 150 andpositioning section 140 to each other. For example, substrate 120 andfirst film 130 can be joined to each other by thermal welding, laserwelding, the use of an adhesive agent, or the like. Second film 150 andpositioning section 140 can also be joined to each other by thermalwelding, laser welding, the use of an adhesive agent, or the like. Anymethod may also be selected from methods known in the art as appropriatefor fixing substrate 120 (first film 130) and positioning section 140(second film 140) to each other. For example, first film 130 andpositioning section 140 can be joined to each other by thermal welding,laser welding, the use of an adhesive agent, or the like. Alternatively,positioning section 140 may be fit on substrate 120 (first film 130) viafitting structures provided on substrate 120 and positioning section140.

(Fluid Handling Method)

Hereinafter, described is an example of a method for handling a fluid byusing fluid handling device 100 according to the present embodiment.FIGS. 5A, 5B, 6A and 6B are diagrams for describing the fluid handlingmethod according to the present embodiment. FIGS. 5A and 5B arecross-sectional views of fluid handling device 100 in the first state,and FIGS. 6A and 6B are cross-sectional views of fluid handling device100 in the second state. FIG. 5B is a partially enlarged sectional viewof a region surrounded by the broken line in FIG. 5A, and FIG. 6B is apartially enlarged sectional view of a region surrounded by the brokenline in FIG. 6A.

The fluid handling method according to the present embodiment includes astep of switching to (selecting) the first state, and a step ofswitching to (selecting) the second state.

Rotary member 160 is rotated for switching to the first state. Fluid 10,such as a reagent or a liquid sample is then provided to fluid inlets121 a and 121 b and introduced into first channels 122 a and 122 b. Inthe first state, gaps are formed (valve opened state) for allowing thefluid to move therethrough between diaphragm 131 a and first partitionwall 123 a, and between diaphragm 131 c and second partition wall 125 a,respectively. At the same time, diaphragm 131 b is pressed by one ofprotrusions 161 a and 161 b to come into contact with first partitionwall 123 b, and diaphragm 131 d is pressed by the other one ofprotrusions 161 a and 161 b to come into contact with second partitionwall 125 b. Accordingly, no gap is formed between diaphragm 131 b andfirst partition wall 123 b, and between diaphragm 131 d and secondpartition wall 125 b (valve closed state).

Therefore, in the first state, fluid 10 introduced into channel chip 110from fluid inlet 121 a is moved by capillarity or outside pressure fromfirst channel 122 a to second channel 124, then from second channel 124to third channel 126 a, via the respective gaps between substrate 120and first film 130 to reach fluid outlet 127 a. In this instance, fluid10 cannot move through between diaphragm 131 b or first partition wall123 b, and between diaphragm 131 d and second partition wall 125 b.Fluid 10 introduced into channel chip 110 from fluid inlet 121 b thuscannot move from first channel 122 b to second channel 124.

Subsequently, rotary member 160 is rotated for switching to the secondstate. Accordingly, gaps are formed between diaphragm 131 b and firstpartition wall 123 b, and between diaphragm 131 d and second partitionwall 125 b, respectively (valve opened state). At the same time,diaphragm 131 a is pressed to come into contact with first partitionwall 123 a, and diaphragm 131 c is pressed to come into contact withsecond partition wall 125 a. Accordingly, no gap is formed betweendiaphragm 131 a and first partition wall 123 a, and between diaphragm131 c and second partition wall 125 a (valve closed state).

Therefore, in the second state, fluid 10 introduced into channel chip110 from fluid inlet 121 a cannot move from first channel 122 a tosecond channel 124, or from second channel 124 to third channel 126 a.On the other hand, fluid 10 introduced into channel chip 110 from fluidinlet 121 b moves from first channel 122 b to second channel 124, thenfrom second channel 124 to third channel 126 b to reach fluid outlet 127b, via the respective gaps between substrate 120 and first film 130.

As described above, switching from the first state to the second stateenables both closing of a channel that connects fluid inlet 121 a andfluid outlet 127 a, and opening of a channel that connects fluid inlet121 b to fluid outlet 127 b. As a result, the flow of fluid 10introduced into channel chip 110 from fluid inlet 121 a is stopped. Inthe fluid handling method described in the present embodiment, the firststate is switched to the second state, but the second state may beswitched to the first state.

In addition, in channel chip 110 according to the present embodiment,the channel connecting fluid inlet 121 a and fluid outlet 127 a sharessecond channel 124 with the channel connecting fluid inlet 121 b andfluid outlet 127 b. Accordingly, a predetermined amount of fluid (i.e.,fluid introduced from fluid inlet 121 a) remaining in second channel 124can be mixed with a fluid introduced from fluid inlet 121 b when thefirst state is switched to the second state.

(Effect)

Single motion, namely the rotation of rotary member 160 can open andclose a channel in fluid handling device 100 according to the presentembodiment. In fluid handling device 100 according to the presentembodiment, first film 130 is disposed between rotary member 160 and abase material (substrate 120) constituting a channel of channel chip110. Therefore, the rotating operation of rotary member 160 for openingand closing the channel does not cause wearing down of the base materialconstituting the channel, which could have occurred due to the slidingof rotary member 160 during the rotation thereof.

In addition, in a fluid handling device described in the conventionalart, a fluid moves through a channel in a rotary member, and thus aforeign substance, which may be generated by the sliding of the rotarymember during the rotation thereof, possibly contaminates the fluid inthe channel. In fluid handling device 100 according to the presentembodiment, meanwhile, rotary member 160 rotates within positioningsection 140 (frame) whose opening is blocked with second film 150. As aforeign substance that may be generated by the sliding does not gooutside the frame, namely positioning section 140, the foreign substancedoes not contaminate a fluid in the channel.

Further, channel chip 110 of fluid handling device 100 according to thepresent embodiment includes second film 150. Therefore, first film 130that is another member constituting a channel is not worn down, either.

The above embodiment describes a mode including second film 150;however, fluid handling device 100 and channel chip 110 according to thepresent invention are not limited to the mode. For example, channel chip110 does not necessarily include second film 150. In this case,polyethylene is preferred as the material of first film 130 forincreasing the slidability between first film 130 and rotary member 160.For increasing the slidability between first film 130 and rotary member160, coating treatment that increases slidability may also be performedon the surface of first film 130.

Fluid handling device 100 (and also channel chip 110) may have secondfilm 150 made of rubber disposed on first film 130, and a third filmmade of polyethylene on second film 150. Using second film 150 made ofrubber enables easier adherence of diaphragms 131 a to 131 d with therespective partition walls (i.e., first partition walls 123 a and 123 band second partition walls 125 a and 125 b) when protrusions 161 a and161 b presses two of diaphragms 131 a to 131 d toward the partitionwalls. Gaps between diaphragms 131 a to 131 d and partition walls can bethus closed more easily. Further, the third film made of polyethyleneenables easier rotation of rotary member 160.

The above embodiment describes a mode in which fluid handling device 100includes positioning section 140; however, a fluid handling deviceaccording to the present invention does not necessarily includepositioning section 140 as long as rotary member 160 can rotate at apredetermined position.

Further, the above embodiment describes a mode that controls the openingand closing of a channel by the rotation of rotary member 160; however,the present invention is not limited to the mode. For example, a slidingmember which has a protrusion formed thereon and is slidable on firstfilm 130 is slid straightly on first film 130 that is disposed onsubstrate 120, thereby controlling the opening and closing of a channel.In this case, the sliding member is slid back and forth on first film130 to bring a diaphragm into contact with a partition wall by pressingthe diaphragm with the protrusion, or separate the diaphragm from thepartition wall, thereby switching between the first state and secondstate. A positioning section in this case holds the sliding member insuch a way that the sliding member can be slid straightly while thepositioning section positions the sliding member.

Embodiment 2

(Configuration of Fluid Handling Device)

FIGS. 7A and 7B illustrate a configuration of fluid handling device 200according to Embodiment 2. FIG. 7A is a bottom view of fluid handlingdevice 200, and FIG. 7B is a front view thereof. FIGS. 8A to 8Cillustrate a configuration of channel chip 210 according to Embodiment2. FIG. 8A is a bottom view of channel chip 210, FIG. 8B is across-sectional view taken along line B-B in FIG. 8A, and FIG. 8C is across-sectional view taken along line C-C in FIG. 8A. FIGS. 9A to 9Cillustrate a configuration of rotary member 260 according to Embodiment2. FIG. 9A is a plan view of rotary member 260, FIG. 9B is a front viewthereof, and FIG. 9C is a cross-sectional view taken along line C-C inFIG. 9A.

As illustrated in FIGS. 7A and 7B, fluid handling device 200 accordingto Embodiment 2 includes channel chip 210 and rotary member 260. Channelchip 210 includes substrate 220 and film 230.

Substrate 220 has a groove and/or through hole formed therein asappropriate within a range that can obtain the effect of the presentembodiment. The thickness and example materials of substrate 220 are thesame as those of substrate 120 according to Embodiment 1.

In the present embodiment, film 230 includes three diaphragms 231. Film230 is the same as first film 130 in Embodiment 1 except for the numberand positions of diaphragms 231. Diaphragms 231 are, except for thepositions thereof in film 230, the same as diaphragms 131 a to 131 d inEmbodiment 1.

Channel chip 210 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 210 includes three first channel units 2A₁ to 2A₃ and onesecond channel unit 2B. Three first channel units 2A₁ to 2A₃ haveidentical configurations except for the positions of the channel unitsin channel chip 210. Therefore, only first channel unit 2A₁ is describedin the following.

First channel unit 2A₁ includes first housing portion 221, first channel222, partition wall 223 and second channel 224.

First housing portion 221 is a bottomed recess for housing a fluid. Inthe present embodiment, first housing portion 221 is composed of athrough hole formed in substrate 220, and film 230 blocking one of theopenings of the through hole. The shape and size of first housingportion 221 are the same as those of fluid inlet 121 a in Embodiment 1,respectively.

A fluid to be housed in first housing portion 221 may be changed asappropriate in accordance with the use of fluid handling device 200. Thefluid may be a reagent, liquid sample, powder or the like.

First channel 222 allows a fluid to move therein. The upstream end offirst channel 222 is connected to first housing portion 221. At thedownstream end of first channel 222, partition wall 223 is disposed. Inthe present embodiment, first channel 222 is composed of a groove formedin substrate 220, and film 230 blocking the opening of the groove. Thecross-sectional area and cross-sectional shape of first channel 222 arethe same as those of first channel 122 a in Embodiment 1, respectively.

Partition wall 223 is formed between the downstream end of first channel222 and the upstream end of second channel 224. Partition wall 223functions as a valve seat of a microvalve for opening and closing achannel. The shape and height of partition wall 223 are the same asthose of first partition wall 123 a in Embodiment 1, respectively.

Second channel 224 allows a fluid to move therein. At the upstream endof second channel 224, partition wall 223 is disposed. The downstreamend of second channel 224 is connected to the upstream end of thirdchannel 225 (described below) of second channel unit 2B. In the presentembodiment, second channel 224 is composed of a groove formed insubstrate 220, and film 230 blocking the opening of the groove. Thecross-sectional area and cross-sectional shape of second channel 224 arethe same as those of first channel 122 a in Embodiment 1, respectively.

Second channel unit 2B includes third channel 225 and second housingportion 226.

Third channel 225 allows a fluid to move therein. The upstream end ofthird channel 225 is connected to the downstream ends of three secondchannels 224 in respective first channel units 2A₁ to 2A₃. Thedownstream end of third channel 225 is connected to second housingportion 226. In the present embodiment, third channel 225 is composed ofa groove formed in substrate 220, and film 230 blocking the opening ofthe groove. The cross-sectional area and cross-sectional shape of thirdchannel 225 are the same as those of first channel 122 a according toEmbodiment 1, respectively.

Second housing portion 226 is a bottomed recess for housing a fluid. Inthe present embodiment, second housing portion 226 is composed of athrough hole formed in substrate 220, and film 230 blocking one of theopenings of the through hole. The shape and size of second housingportion 226 are the same as those of fluid outlet 127 a in Embodiment 1,respectively.

A fluid to be housed in second housing portion 226 may be changed asappropriate in accordance with the use of fluid handling device 200. Forexample, second housing portion 226 may be used as a chamber for mixingfluids coming from first housing portions 221 in three first channelunits 2A₁ to 2A₃, respectively. In this case, the size of second housingportion 226 is preferably sufficient to accommodate the volume of thehousing fluids coming from first housing portions 221 in first channelunits 2A₁ to 2A₃.

Rotary member 260 is the same as rotary member 160 in Embodiment 1except that notch 162 or handle 163 is not formed in rotary member 260,and the shape of protrusion 261 formed on the underside of rotary member260 is different. Rotary member 260 may be held by a positioning sectionfor positioning rotary member 260 so that rotary member 260 can rotate.

As illustrated in FIGS. 9A to 9C, protrusion 261 is formed on theunderside of rotary member 260 in the present embodiment. Protrusion 261is a projected line extending along the rotation direction of rotarymember 260. Protrusion 261 includes one notch 262. The length of notch262 in the circumferential direction of rotary member 260 is, forexample, the same as or larger than the size of diaphragm 231 in planview. In the present embodiment, the length of notch 262 is about thesame as the size of diaphragm 231.

Fluid handling device 200 according to the present embodiment includesthree microvalves. The microvalves are respectively composed ofpartition walls 223 in first channel units 2A₁ to 2A₃ and correspondingdiaphragms 231. In fluid handling device 200, each microvalve switchesbetween a first state and second state. In the first state, protrusion261 is positioned so as not to face partition wall 223 with diaphragm231 therebetween, and in the second state, protrusion 261 is positionedso as to face partition wall 223 with diaphragm 231 therebetween. Inother words, notch 262 of rotary member 260 is positioned so as to facepartition wall 223 with diaphragm 231 therebetween in the first state.

Fluid handling device 200 is produced in the same manner as the fluidhandling device according to Embodiment 1 except that positioningsection 140 is fixed to the substrate. For example, fluid handlingdevice 200 may be produced by disposing rotary member 260 on substrate220 having film 230 joined thereto at a desired position so that film230 faces the underside of rotary member 260.

(Fluid Handling Method)

Hereinafter, described is an example of a method for handling a fluid byusing fluid handling device 200 according to Embodiment 2 (fluidhandling method according to Embodiment 2). In the present embodiment, amethod is described in which a fluid each coming from first housingportions 221 of respective three first channel units 2A₁ to 2A₃ is movedto second housing portion 226 and mixed.

Predetermined fluids are previously housed in first housing portions 221of first channel units 2A₁ to 2A₃, respectively. Rotary member 260 isthen rotated for switching the microvalve in first channel unit 2A₁ tothe first state (valve opened state). In this instance, the microvalvesin respective first channel units 2A₂ and 2A₃ are in the second state(valve closed state). Accordingly, first channel 222 communicates withsecond channel 224 in first channel unit 2A₁, and first channel 222 doesnot communicate with second channel 224 in each of first channel units2A₂ and 2A₃. A fluid in first housing portion 221 of first channel unit2A₁ is thus moved by outside pressure or the like from first channel222, to a gap between diaphragm 231 and partition wall 223, to secondchannel 224, and then to third channel 225 to reach second housingportion 226.

Subsequently, rotary member 260 is further rotated to open themicrovalve in first channel unit 2A₂ and the microvalve in first channelunit 2A₃ one at a time. This can move fluids in first housing portions221 of first channel units 2A₂ and 2A₃, respectively, to second housingportion 226 in the same manner as the movement of a liquid from firsthousing portion 221 of first channel unit 2A₁ to second housing portion226. The fluids coming from respective first housing portions 221 offirst channel units 2A₁ to 2A₃ thus can be mixed and reacted in secondhousing portion 226.

In fluid handling device 200 as described above, the rotation of rotarymember 260 enables suitable movement of fluids by switching between thefirst state and the second state.

(Effect)

Channel chip 210, fluid handling device 200 and the fluid handlingmethod according to Embodiment 2 have the effects the same as inEmbodiment 1.

In addition, for mixing a plurality of fluids, it is necessary in somecases for a conventional fluid handling method to move the plurality offluids using an external device or to move a channel chip. The fluidhandling method according to the present embodiment, on the other hand,can mix a plurality of fluids by single motion, namely the rotation ofrotary member 260. In the present embodiment, as it is not necessary tomove a fluid using an external device, the fluid can be handled easilyand highly efficiently, and further, because it is not necessary to movea channel chip, no liquid leakage occurs.

Embodiment 3

FIGS. 10A to 10C illustrate a configuration of channel chip 310according to Embodiment 3. FIG. 10A is a bottom view of channel chip310, FIG. 10B is a cross-sectional view taken along line B-B in FIG.10A, and FIG. 10C is a cross-sectional view taken along line C-C in FIG.10A.

A fluid handling device according to Embodiment 3 includes channel chip310 and rotary member 260. The fluid handling device according toEmbodiment 3 is the same as fluid handling device 200 according toEmbodiment 2 except for a configuration of liquid chip 310. Therefore,the same reference numerals are given to the components the same asthose of fluid handling device 200 according to Embodiment 2, and thedescriptions thereof will be omitted.

Channel chip 310 includes substrate 320 and first film 230. Substrate320 has a groove and/or through hole formed therein as appropriatewithin a range that can obtain the effect of the present embodiment. Thethickness and example materials of substrate 320 are the same as thoseof substrate 120 according to Embodiment 1.

Channel chip 310 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 310 includes three first channel units 3A₁ to 3A₃ and onesecond channel unit 3B.

First channel units 3A₁ to 3A₃ each include first housing portion 221,first channel 222 and partition wall 223. Second channel unit 3Bincludes third channel 325 and second housing portion 226.

Second channel unit 3B is the same as second channel unit 2B inEmbodiment 2 except that the shape of third channel 325 is differentfrom that of third channel 225. Specifically, third channel 325 ofsecond channel unit 3B extends in such a way that when channel chip 310is viewed from the bottom, third channel 325 links three partition walls223 in respective first channel units 3A₁ to 3A₃ and second housingportion 226 in second channel unit 3B in sequence. In the presentembodiment, third channel 325 extends in such a way that a portionthereof extending in the shape of an arc links three partition walls 223of respective first channel units 3A₁ to 3A₃, and another portionthereof extending straight is connected to second housing portion 226 atits end.

In channel chip 310, diaphragm 231 faces a facing region composed of adownstream-end portion of first channel 222, partition wall 223 and apart of third channel 325.

The fluid handling device according to Embodiment 3 may be used in thesame manner as fluid handling device 200 according to Embodiment 2. Inthe fluid handling device according to Embodiment 3, the rotation ofrotary member 260 also enables suitable movement of fluids by switchingbetween the first state and the second state.

In addition, in channel chip 310, a fluid coming from first housingportion 221 moves to second housing portion 226 through first channel222, the gap between diaphragm 231 and partition wall 223, and thirdchannel 325. Therefore, when a cleaning fluid moves as the fluid fromfirst housing portion 221 of first channel unit 3A₁ to second housingportion 226, the cleaning fluid can move through the entire channelpositioned downstream of partition wall 223 (i.e., third channel 325).This enables cleaning of the entire channel positioned downstream ofpartition wall 223 by a single cleaning operation in channel chip 310.

(Effect)

Channel chip 310, the fluid handling device and the fluid handlingmethod according to Embodiment 3 have the effects the same as inEmbodiment 1. In addition, a single cleaning operation can clean theentire channel positioned downstream of partition wall 223 in Embodiment3.

Embodiment 4

FIGS. 11A to 11C illustrate a configuration of channel chip 410according to Embodiment 4. FIG. 11A is a bottom view of channel chip410, FIG. 11B is a cross-sectional view taken along line B-B in FIG.11A, and FIG. 11C is a cross-sectional view taken along line C-C in FIG.11A.

A fluid handling device according to Embodiment 4 includes channel chip410 and rotary member 260. The fluid handling device according toEmbodiment 4 is the same as the fluid handling device according toEmbodiment 3 except for a configuration of liquid chip 410. Therefore,the same reference numerals are given to the components the same asthose of the fluid handling device according to Embodiment 3, and thedescriptions thereof will be omitted.

Channel chip 410 includes substrate 420 and film 430. Substrate 420 hasa groove and/or through hole formed therein as appropriate within arange that can obtain the effect of the present embodiment. Thethickness and example materials of substrate 420 are the same as thoseof substrate 120 according to Embodiment 1.

Film 430 includes three diaphragms 431. Film 430 is the same as film 230in Embodiment 2 except for the positions of diaphragms 431. Diaphragms431 are, except for the positions thereof in film 430, the same asdiaphragms 131 a to 131 d in Embodiment 1.

Channel chip 410 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 410 includes three first channel units 4A₁ to 4A₃ and onesecond channel unit 4B.

First channel units 4A₁ to 4A₃ are the same as first channel units 3A₁to 3A₃ in Embodiment 3 except for the positions of first housingportions 221, first channels 222 and partition walls 223.

Second channel unit 4B is the same as second channel unit 3B inEmbodiment 3 except that the shape of third channel 425 is differentfrom that of third channel 325. Specifically, third channel 425 isdisposed in such a way that when channel chip 410 is viewed from thebottom, third channel 425 does not cross a part (hereinafter alsoreferred to as “slide part”) where protrusion 261 of rotary member 260slides on first film 430. In Embodiment 4, third channel 425 is disposedin such a way that when channel chip 410 is viewed from the bottom,third channel 425 is positioned outside the slide part.

The fluid handling device according to Embodiment 4 may be used in thesame manner as the fluid handling device according to Embodiment 3. Inthe fluid handling device according to Embodiment 4, the rotation ofrotary member 260 also enables suitable movement of fluids by switchingbetween the first state and the second state.

(Effect)

Channel chip 410, the fluid handling device and the fluid handlingmethod according to Embodiment 4 have the effects the same as inEmbodiment 3. In addition, in Embodiment 4, third channel 425 isdisposed in such a way that when channel chip 410 is viewed from thebottom, third channel 425 does not cross the slide part where protrusion261 of rotary member 260 slides on first film 430. This preventsprotrusion 261 of rotary member 260 from pressing first film 430 onthird channel 425.

Embodiment 5

(Configuration of Fluid Handling Device)

FIGS. 12A and 12B illustrate a configuration of fluid handling device500 according to Embodiment 5. FIG. 12A is a bottom view of fluidhandling device 500, and FIG. 12B is a front view thereof. FIGS. 13A to13C illustrate a configuration of channel chip 510 according toEmbodiment 5. FIG. 13A is a bottom view of channel chip 510, FIG. 13B isa cross-sectional view taken along line B-B in FIG. 13A, and FIG. 13C isa cross-sectional view taken along line C-C in FIG. 13A. FIGS. 14A to14C illustrate a configuration of rotary member 560 according toEmbodiment 5. FIG. 14A is a plan view of rotary member 560, FIG. 14B isa front view thereof, and FIG. 14C is a cross-sectional view taken alongline C-C in FIG. 14A.

Fluid handling device 500 according to Embodiment 5 includes channelchip 510 and rotary member 560. Some of the components of fluid handlingdevice 500 according to Embodiment 5 are the same as those of fluidhandling device 200 according to Embodiment 2. Therefore, the samereference numerals are given to the components the same as those of thefluid handling device according to Embodiment 2, and the descriptionsthereof will be omitted.

Channel chip 510 includes substrate 520 and film 530. Substrate 520 hasa groove and/or through hole formed therein as appropriate within arange that can obtain the effect of the present embodiment. Thethickness and example materials of substrate 520 are the same as thoseof substrate 120 according to Embodiment 1.

Film 530 includes three diaphragms 231 and one diaphragm 531. Film 530is the same as film 230 in Embodiment 2 except for the number ofdiaphragms 231 and 531. Diaphragm 531 is disposed above partition wall223 of first channel unit 5A₄. Diaphragms 531 is, except for theposition thereof on film 530, the same as diaphragms 131 a to 131 d inEmbodiment 1.

Channel chip 510 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 510 includes four first channel units 2A₁ to 2A₃ and 5A₄,and second housing portion 526. Channel chip 510 is the same as channelchip 210 according to Embodiment 2 except that channel chip 510 includesfirst channel unit 5A₄ in place of second channel unit 2B, and theposition of second housing portion 526 is different from that of secondhousing portion 226.

In Embodiment 5, second housing portion 526 is disposed at thedownstream-end portions (junction) of second channels 224 in respectivefour first channel units 2A₁ to 2A₃ and 5A₄. Second housing portion 526is the same as second housing portion 226 in Embodiment 2 except for theposition thereof in channel chip 510.

Rotary member 560 is the same as rotary member 260 in Embodiment 2except that the shape of protrusion 561 formed on the underside ofrotary member 560 is different from that of protrusion 261. Protrusion561 is a projected line extending along the rotation direction of rotarymember 560. Protrusion 561 includes plurality of notches. The number andpositions of the notches can be adjusted as appropriate in accordancewith the configuration, such as the number and positions of partitionwalls 223, of fluid handling device 500.

As illustrated in FIG. 14A, protrusion 561 includes six notches 562 a to562 f in the present embodiment. The positions of six notches 562 a to562 f may be determined in such a way that a motion process in fluidhandling device 500 is terminated when rotary member 560 is rotated at apredetermined angle (for example, 90°) in one direction.

There is an assumption that when rotary member 560 is viewed from thebottom, a point where the bottom surface of rotary member 560 and therotation axis thereof intersect is a center, and the position of notch562 a is a reference position (central angle 0°). In the presentembodiment, notches 562 b, 562 c, 562 d, 562 e and 562 f are disposed atpositions corresponding to central angles 60°, 120°, 195°, 225°, and255°, respectively,

The length of each of notches 562 a to 562 f in the circumferentialdirection of rotary member 560 is, for example, the same as or largerthan the size of each of diaphragms 231 and 531 in plan view. Notches562 a to 562 f may have the same length or different lengths. In thepresent embodiment, notches 562 a to 562 f have identical lengths thatare about the same as the size of diaphragms 231 and 531.

(Fluid Handling Method)

Hereinafter, described is an example of a method for handling a fluid byusing fluid handling device 500 according to Embodiment 5 (fluidhandling method according to Embodiment 5). In the present embodiment, amethod is described in which a reaction liquid is moved from each offirst housing portions 221 in respective three first channel units 2A₁to 2A₃ to second housing portion 526 for a desired reaction, and everytime after the reaction liquid is moved, a cleaning fluid is moved fromfirst housing portion 221 of first channel unit 5A₄ to second housingportion 526 for cleaning second housing portion 526. Accordingly, thereaction and cleaning are alternately performed in the presentembodiment.

FIGS. 15A to 15F are schematic views of the bottom surface of fluidhandling device 500 for describing respective steps in a fluid handlingmethod according to Embodiment 5. As illustrated in FIGS. 15A to 15F,the fluid handling method according to the present embodiment includesfirst to sixth steps.

(First Step)

Predetermined reaction liquids are previously stored in first housingportions 221 of first channel units 2A₁ to 2A₃, respectively, and acleaning fluid in first housing portion 221 of first channel unit 5A₄.Rotary member 560 is then rotated for switching the microvalve in firstchannel unit 2A₁ to the first state (valve opened state; see FIG. 15A).In this instance, the microvalves in first channel units 2A₂, 2A₃ and5A₄ are all in the second state (valve closed state; see FIG. 15A). Thisenables the reaction liquid in first housing portion 221 of firstchannel unit 2A₁ to move to second housing portion 526. In secondhousing portion 526, a desired reaction is performed. After the reactionin the first step, the reaction liquid introduced into second housingportion 526 from first housing portion 221 of first channel unit 2A₁ isremoved.

(Second Step)

Rotary member 560 is then further rotated for switching the microvalvein first channel unit 5A₄ to the first state (valve opened state; seeFIG. 15B). In this instance, the microvalves in first channel units 2A₁to 2A₃ are all in the second state (valve closed state; see FIG. 15B).This enables the cleaning fluid in first housing portion 221 of firstchannel unit 5A₄ to move to second housing portion 526, thereby cleaningthe inside of second housing portion 526. After the cleaning in thesecond step, the cleaning fluid introduced into second housing portion526 from first housing portion 221 of first channel unit 5A₄ is removed.

(Third Step)

Rotary member 560 is then further rotated for switching the microvalvein first channel unit 2A₂ to the first state (valve opened state; seeFIG. 15C). In this instance, the microvalves in first channel units 2A₁,2A₃ and 5A₄ are all in the second state (valve closed state; see FIG.15C). In a similar manner as in the first step, the reaction liquid infirst housing portion 221 of first channel unit 2A₂ moves to secondhousing portion 526, and a desired reaction is performed. After thereaction in the third step, the reaction liquid introduced into secondhousing portion 526 from first housing portion 221 of first channel unit2A₂ is removed.

(Fourth Step)

Rotary member 560 is then further rotated for cleaning the inside ofsecond housing portion 526 in a similar manner as in the second step(see FIG. 15D). After the cleaning in the fourth step, the cleaningfluid introduced into second housing portion 526 from first housingportion 221 of first channel unit 5A₄ is removed.

(Fifth Step)

Rotary member 560 is then further rotated for switching the microvalvein first channel unit 2A₃ to the first state (valve opened state; seeFIG. 15E). In this instance, the microvalves in first channel units 2A₁,2A₂ and 5A₄ are all in the second state (valve closed state; see FIG.15E). In a similar manner as in the first step, the reaction liquid infirst housing portion 221 of first channel unit 2A₃ moves to secondhousing portion 526, and a desired reaction is performed. After thereaction in the fifth step, the reaction liquid introduced into secondhousing portion 526 from first housing portion 221 of first channel unit2A₃ is removed.

(Sixth Step)

Finally, Rotary member 560 is further rotated for cleaning the inside ofsecond housing portion 526 in a similar manner as in the second step(see FIG. 15F). After the cleaning in the sixth step, the cleaning fluidintroduced into second housing portion 526 from first housing portion221 of first channel unit 5A₄ is removed.

In the fluid handling method according to Embodiment 5 as describedabove, the rotation of rotary member 560 in one direction enablessuitable movement of fluids by switching between the first state and thesecond state. Accordingly, there is no need to rotate rotary member 560in the opposite direction.

(Effect)

Channel chip 510, fluid handling device 500 and the fluid handlingmethod according to Embodiment 5 have the effects the same as inEmbodiment 1.

Modification of Embodiment 5

The fluid handling method according to Embodiment 5 is not limited tothe above described method. FIGS. 16A to 16E are schematic views of thebottom surface of fluid handling device 500 for describing respectivesteps in a fluid handling method according to a modification ofEmbodiment 5. As illustrated in FIGS. 16A to 16E, the fluid handlingmethod according to the present modification includes first to fifthsteps.

(First, Third and Fourth Steps)

The first, third and fourth steps in the modification of Embodiment 5are the same as the first, second and third steps of the fluid handlingmethod according to Embodiment 5, respectively (compare FIG. 15A to FIG.16A, FIG. 15B to 16C, and FIG. 15C to 16D). Therefore, the second andfifth steps in the modification of Embodiment 5 are described in thefollowing.

(Second Step)

In the second step of the present modification, the microvalve in firstchannel unit 2A₁ as well as the microvalve in first channel unit 5A₄ isopened (see FIG. 16B). In this instance, rotary member 560 is disposedin such a way that protrusion 561 partly faces partition walls 223 offirst channel units 2A₁ and 5A₄ with diaphragms 231 and 531therebetween, respectively. Accordingly, the microvalves in firstchannel units 2A₁ and 5A₄ are in a partly opened state in the secondstep in the present modification. This enables the cleaning fluid infirst housing portion 221 of first channel unit 5A₄ to move to firsthousing portion 221 in first channel unit 2A₁ through second housingportion 526. Therefore, the second step of the present modification canclean the inside of second channel 224 in first channel unit 2A₁ as wellas the inside of second housing portion 526. This can prevent thereaction liquid from remaining inside second channel 224 of firstchannel unit 2A₁.

(Fifth Step)

Similarly, in the fifth step of the present modification, the microvalvein first channel units 2A₂ as well as the microvalve in first channelunit 5A₄ is in a partly opened state (see FIG. 16E). Therefore, theinside of second channel 224 in first channel unit 2A₂ as well as theinside of second housing portion 526 can be cleaned in a similar manneras in the second step of the present modification. This can prevent thereaction liquid from remaining inside second channel 224 of firstchannel unit 2A₂.

Embodiment 6

FIGS. 17A to 17C illustrate a configuration of rotary member 660according to Embodiment 6. FIG. 17A is a plan view of rotary member 660,FIG. 17B is a front view thereof, and FIG. 17C is a cross-sectional viewtaken along line C-C in FIG. 17A.

(Configuration of Fluid Handling Device)

A fluid handling device according to Embodiment 6 includes channel chip510 and rotary member 660. The fluid handling device according toEmbodiment 6 is the same as fluid handling device 500 according toEmbodiment 5 except for a configuration of rotary member 660. Therefore,the same reference numerals are given to the components the same asthose of fluid handling device 500 according to Embodiment 5, and thedescriptions thereof will be omitted.

Rotary member 660 is the same as rotary member 560 according toEmbodiment 5 except that notches 662 a to 662 c formed in protrusion 661are different in size from notches 562 a to 562 c formed in protrusion561.

Protrusion 661 includes six notches 662 a to 662 c and 562 d to 562 f.In the present embodiment, notches 662A to 662C are different fromnotches 562 d to 562 f in length in the circumferential direction ofrotary member 660. The length of each of notches 662 a to 662 c is abouttwice the size of diaphragm 231 in plan view. The length of each ofnotches 562 d to 562 f is about the same as the size of diaphragm 231 inplan view.

(Fluid Handling Method)

FIGS. 18A to 18F are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to Embodiment 6. As illustrated in FIGS. 18A to 18F,the fluid handling method according to Embodiment 6 includes first tosixth steps.

(First, Third and Fifth Steps)

The first, third and fifth steps in Embodiment 6 are the same as thefirst, third and fifth steps in Embodiment 5, respectively (compare FIG.15A to FIG. 18A, FIG. 15C to 18C, and FIG. 15E to 18E). The second,fourth and sixth steps are described in the following.

(Second Step)

The second step in Embodiment 6 is substantially the same as the secondstep in the modification of Embodiment 5 (compare FIG. 16B to FIG. 18B).In the second step of Embodiment 6, the microvalve in first channel unit2A₁ as well as the microvalve in first channel unit 5A₄ is in the firststate (valve opened state; see FIG. 18B). In this instance, rotarymember 660 is disposed in such a way that protrusion 661 does not facepartition wall 223 of first channel unit 2A₁ or 5A₄ with diaphragm 231or 531 therebetween, respectively. This can clean the inside of secondchannel 224 in first channel unit 2A₁ as well as the inside of secondhousing portion 526, thereby preventing the reaction liquid fromremaining inside second channel 224 of first channel unit 2A₁. After thecleaning in the second step, the cleaning fluid introduced into secondhousing portion 526 from first housing portion 221 of first channel unit5A₄ is removed.

As described above, the microvalves in first channel units 2A₁ and 5A₄are in a partly opened state in the second step in the modification ofEmbodiment 5. In the second step of Embodiment 6, meanwhile, protrusion661 does not face partition wall 223 in first channel unit 2A₁ or 5A₄ atall. Therefore, the microvalves in first channel units 2A₁ and 5A₄ arefully opened compared to the modification, and thus more fluid can movethrough in the second step of Embodiment 6. The same can applies to thefourth and sixth steps in Embodiment 6 described below.

(Fourth Step)

The fourth step in Embodiment 6 is substantially the same as as thefifth step in the modification of Embodiment 5 (compare FIG. 16E andFIG. 18D). In the fourth step of Embodiment 6, the microvalve in firstchannel unit 2A₂ as well as the microvalve in first channel unit 5A₄ isin the first state (valve opened state; see FIG. 18D). This can cleanthe inside of second channel 224 in first channel unit 2A₂ as well asthe inside of second housing portion 526, thereby preventing thereaction liquid from remaining inside second channel 224 of firstchannel unit 2A₂, in a similar manner as in the second step ofEmbodiment 6. After the cleaning in the fourth step, the cleaning fluidintroduced into second housing portion 526 from first housing portion221 of first channel unit 5A₄ is removed.

(Sixth Step)

In the sixth step of Embodiment 6, the microvalve in first channel unit2A₃ as well as the microvalve in first channel unit 5A₄ is in the firststate (valve opened state; see FIG. 18F). This can clean the inside ofsecond channel 224 in first channel unit 2A₃ as well as the inside ofsecond housing portion 526, thereby preventing the reaction liquid fromremaining inside second channel 224 of first channel unit 2A₃, in asimilar manner as in the second step of Embodiment 6. After the cleaningin the sixth step, the cleaning fluid introduced into second housingportion 526 from first housing portion 221 of first channel unit 5A₄ isremoved.

(Effect)

Channel chip 610, the fluid handling device and the fluid handlingmethod according to Embodiment 6 have the effects the same as in themodification of Embodiment 5.

Embodiment 7

(Configuration of Fluid Handling Device)

FIGS. 19A to 19C illustrate a configuration of fluid handling device 700or channel chip 710 according to Embodiment 7. FIG. 19A is a bottom viewof fluid handling device 700, FIG. 12B is a front view thereof, and FIG.19C is a bottom view of channel chip 710. FIGS. 20A to 20C illustrate aconfiguration of rotary member 760 according to Embodiment 7. FIG. 20Ais a plan view of rotary member 760, FIG. 20B is a front view thereof,and FIG. 20C is a cross-sectional view taken along line C-C in FIG. 20A.

Fluid handling device 700 according to Embodiment 7 includes channelchip 710 and rotary member 760. Some of the components of the fluidhandling device according to Embodiment 7 are the same as those of fluidhandling device 500 according to Embodiment 5. Therefore, the samereference numerals are given to the components the same as those offluid handling device 500 according to Embodiment 5, and thedescriptions thereof will be omitted.

Channel chip 710 includes substrate 720 and film 730. Substrate 720 hasa groove and/or through hole formed therein as appropriate within arange that can obtain the effect of the present embodiment. Thethickness and example materials of substrate 720 are the same as thoseof substrate 120 according to Embodiment 1.

Film 730 includes three diaphragms 231 and one diaphragm 731. Film 730is the same as film 530 in Embodiment 5 except for the position ofdiaphragm 731. Diaphragm 731 is disposed above partition wall 223 offirst channel unit 7A₄. Diaphragm 731 is, except for the positionthereof on film 730, the same as diaphragm 531 in Embodiment 5.

Channel chip 710 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 710 includes four first channel units 2A₁ to 2A₃ and 7A₄,and second housing portion 526. Channel chip 710 is the same as channelchip 510 according to Embodiment 5 except that channel chip 710 includesfirst channel unit 7A₄ in place of first channel unit 5A₄. First channelunit 7A₄ is the same as first channel unit 5A₄ except for the positionof partition wall 223. Partition wall 223 in first channel unit 7A₄ isdisposed at a position close to second housing portion 526 compared topartition wall 223 in first channel unit 5A₄ (compare FIG. 13A to FIG.19C).

First protrusion 761 a and second protrusion 761 b are formed on theunderside of rotary member 760. First protrusion 761 a and secondprotrusion 761 b are projected lines extending along the rotationdirection of rotary member 760. First protrusion 761 a and secondprotrusion 761 b are concentrically disposed when rotary member 760 isviewed from the bottom. In the present embodiment, first protrusion 761a is positioned so as to surround second protrusion 761 b when rotarymember 760 is viewed from the bottom.

First protrusion 761 a includes one notch 762 a. The length of notch 762a in the circumferential direction of rotary member 760 is, for example,the same as or larger than the size of each of diaphragms 231 and 731 inplan view. In the present embodiment, the length of notch 762 a is aboutthe same as the size of each of diaphragms 231 and 731.

Second protrusion 761 b includes four notches 762 b to 762 e. The lengthof each of notches 762 b to 762 e in the circumferential direction ofrotary member 760 is, for example, the same as or larger than the sizeof each of diaphragms 231 and 731 in plan view. In the presentembodiment, notches 762 b to 762 e have identical lengths that are aboutthe same as the size of diaphragms 231 and 731. In the presentembodiment, notches 762 b to 762 e are disposed respectively atpositions corresponding to four corners of a virtual quadrangle thatcircumscribes second protrusion 761 b.

FIGS. 21A to 21F are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to Embodiment 7. As illustrated in FIGS. 21A to 21F,the fluid handling method according to Embodiment 7 includes first tosixth steps. The first to sixth steps in Embodiment 7 correspond to thefirst to sixth steps in Embodiment 5 in view of the moving direction ofa fluid (compare FIGS. 15A to 15F to FIGS. 21A to 21F), respectively.

The fluid handling method according to Embodiment 7 is the same as thefluid handling method according to Embodiment 5 except that firstprotrusion 761 a contributes to the switching of the open/close state(between the first state and second state) of the microvalve in each offirst channel units 2A₁ to 2A₃, while second protrusion 761 bcontributes to the switching of the open/close state (between the firststate and second state) of the microvalve in first channel unit 7A₄.

(Effect)

Channel chip 710, fluid handling device 700 and the fluid handlingmethod according to Embodiment 7 have the effects the same as inEmbodiment 5.

Embodiment 8

FIG. 22 illustrates a configuration of channel chip 810 according toEmbodiment 8.

A fluid handling device according to Embodiment 8 includes channel chip810 and rotary member 760. The fluid handling device according toEmbodiment 8 is the same as fluid handling device 700 according toEmbodiment 7 except for a configuration of channel chip 810. Therefore,the same reference numerals are given to the components the same asthose of fluid handling device 700 according to Embodiment 7, and thedescriptions thereof will be omitted.

Channel chip 810 includes substrate 820 and film 830. Substrate 820 hasa groove and/or through hole formed therein as appropriate within arange that can obtain the effect of the present embodiment. Thethickness and example materials of substrate 820 are the same as thoseof substrate 120 according to Embodiment 1.

Film 830 includes three diaphragms 231, one diaphragm 731 and threediaphragms 831. Film 830 is the same as film 730 in Embodiment 7 exceptfor the number of diaphragms 231, 731 and 831. Diaphragms 831 aredisposed above partition walls 223 in below described third channelunits 8C₁ to 8C₃, respectively. Diaphragms 831 are, except for thepositions thereof on film 830, the same as diaphragm 531 in Embodiment5.

Channel chip 810 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 810 includes four first channel units 2A₁ to 2A₃ and 7A₄,three third channel units 8C₁ to 8C₃ and second housing portion 526.Channel chip 810 is the same as channel chip 710 according to Embodiment7 except that channel chip 810 further includes three third channelunits 8C₁ to 8C₃. Three third channel units 8C₁ to 8C₃ have identicalconfigurations except for the positions of the channel units in channelchip 810. Therefore, only third channel unit 8C₁ is described in thefollowing.

Third channel unit 8C₁ includes first housing portion 221, first channel222, partition wall 223 and fourth channel 827.

Fourth channel 827 allows a fluid to move therein. Partition wall 223 ofthird channel unit 8C₁ is disposed at one end of fourth channel 827. Atthe other end of fourth channel 827, the upstream end of second channel224 and partition wall 223 both in first channel unit 2A₁ are disposed.In the present embodiment, fourth channel 827 may be composed of agroove formed in substrate 820 and film 830 blocking the opening of thegroove. The cross-sectional area and cross-sectional shape of fourthchannel 827 are the same as those of first channel 122 a in Embodiment1, respectively.

FIGS. 23A and 23B are schematic views of the bottom surface of a fluidhandling device for describing respective steps in a fluid handlingmethod according to Embodiment 8. As illustrated in FIGS. 23A and 23B,the fluid handling method according to Embodiment 8 includes first andsecond steps. The first step in Embodiment 8 corresponds to the firststep in Embodiment 7 in view of the moving direction of a fluid (compareFIG. 21A to FIG. 23A). Therefore, the second step in Embodiment 8 isdescribed in the following.

In the second step of Embodiment 8, the microvalve in third channel unit8C₁ as well as the microvalve in first channel unit 7A₄ is in the firststate (valve opened state; see FIG. 23B). A cleaning fluid in firsthousing portion 221 of first channel unit 7A₄ thus moves through secondhousing portion 526, then second channel 224 of first channel unit 2A₁to reach first housing portion 221 in third channel unit 8C₁. Therefore,the second step of Embodiment 8 can clean the inside of second channel224 of first channel unit 2A₁ as well as the inside of second housingportion 526. This can prevent the reaction liquid from remaining insidesecond channel 224 of first channel unit 2A₁.

In addition, the microvalves in first channel units 2A₁ to 2A₃ are allin the second state (valve closed state) in the second step ofEmbodiment 8. The cleaning fluid in first housing portion 221 of firstchannel unit 7A₄ thus does not flow into first channels 222 of firstchannel units 2A₁ to 2A₃.

(Effect)

Channel chip 810, the fluid handling device and the fluid handlingmethod according to Embodiment 8 have the effects the same as inEmbodiment 7. In addition, Embodiment 8 can prevent a cleaning fluidfrom flowing into first channel 222, and also a reaction liquid fromremaining inside second channel 224.

Embodiment 9

FIGS. 24A and 24B illustrate a configuration of fluid handling device900 according to Embodiment 9. FIG. 24A is a bottom view illustratingthe configuration of fluid handling device 900, and FIG. 24B is a frontview thereof. Fluid handling device 900 according to Embodiment 9includes channel chip 910 and rotary member 960. Some of the componentsof fluid handling device 900 according to Embodiment 9 are the same asthose of the fluid handling device according to Embodiment 3. Therefore,the same reference numerals are given to the components the same asthose of the fluid handling device according to Embodiment 3, and thedescriptions thereof will be omitted.

Channel chip 910 includes substrate 320, film 230 and first electrode940.

Channel chip 910 is the same as channel chip 310 according to Embodiment3 except that channel chip 910 further includes first electrode 940. Inthe present embodiment, substrate 320 is composed of an insulationmaterial.

First electrode 940 may be at any position as long as first electrode940 can contact second electrode 963. First electrode 940 may bedisposed on, for example, film 230 or substrate 320. When firstelectrode 940 is disposed on substrate 320, a through hole is formed inthe film for exposing the first electrode 940 on the surface of channelchip 810. In the present embodiment, first electrode 940 is disposed onfilm 230.

The position and shape of first electrode 940 are not limited as long asfirst electrode 940 can contact second electrode 963 on rotary member960. In fluid handling device 900, first electrode 940 is disposed atleast at a position facing the bottom surface of rotary member 960. Forthe connection with an external circuit, first electrode 940 may extendto the outer edge of film 230.

The number of first electrodes 940 is not limited, and may beappropriately set in accordance with, for example, the number of thechannel units in channel chip 910. The present embodiment has four firstelectrodes 940 which are disposed in the vicinities of first channelunits 3A₁ to 3A₃ and second channel unit 3B, respectively, when channelchip 910 is viewed from the bottom.

In the present embodiment, first electrodes 940 are disposed on film 230at least at positions corresponding to partition walls 223.

Any material that has desired conductivity may be selected for firstelectrode 940. For example, examples of the materials of first electrode940 include gold, silver, copper, aluminum, alloys thereof, and carbonpaste. Examples of methods for forming first electrode 940 includesputtering, vapor deposition, plating and printing. First electrode 940may have any thickness which is, for example, preferably 100 nm to 20μm.

Rotary member 960 includes protrusion 261 and second electrode 963.Rotary member 960 is the same as rotary member 260 in Embodiment 2except that rotary member 960 has a size different from rotary member260, and further includes second electrode 963. In the presentembodiment, the body of rotary member 960 is composed of an insulationmaterial.

Second electrode 963 may be at any position as long as second electrode963 can contact first electrode 940. Second electrode 963 is disposed onthe outer surface of the body of rotary member 960. In the presentembodiment, second electrode 963 is disposed at least on the bottomsurface of rotary member 960. Second electrode 963 may be disposed insuch a way that a part thereof to be in contact with first electrode 940is approximately at the same height as the upper surface of protrusion261. For the connection with an external circuit, second electrode 963may extend to the side surface or top surface of rotary member 960.

Second electrode 963 may have any shape as long as second electrode 963can contact first electrode 940 disposed on film 230. The part, which isto be in contact with first electrode 940, in second electrode 963 maybe formed to protrude toward first electrode 940.

In the present embodiment, second electrode 963 is disposed on thebottom surface of the body of rotary member 960 at least at a positioncorresponding to notch 262 formed in protrusion 261.

The thickness and example materials of second electrode 963, and themethods for forming second electrode 963 are the same as in the case offirst electrode 940.

A fluid handling method using fluid handling device 900 according toEmbodiment 9 is the same as the fluid handling method according toEmbodiment 3. In addition, in Embodiment 9, first electrode 940 disposedon film 230 can contact second electrode 963 disposed on the body ofrotary member 960 when rotary member 960 is rotated. The externalcircuit can detect the contact between first electrode 940 and secondelectrode 963. The rotational position of rotary member 960 (at leastone of the positions of protrusion 261 and notch 262) may be detected onthe basis of the detection result.

As described above, first electrodes 940 are disposed at positionscorresponding to partition walls 223 of channel units, respectively, inEmbodiment 9. Second electrode 963 is disposed on the bottom surface ofthe body of rotary member 960 at a position facing notch 262 ofprotrusion 261. The occasion when notch 262 of rotary member 960 ispositioned above partition wall 223 (switched to the first state) thuscan be detected on the basis of the above detection result. Therefore,the rotational position of rotary member 960 can be accurately detectedfor switching between the first state and second state in each channelunit.

(Effect)

Channel chip 910, fluid handling device 900 and the fluid handlingmethod according to Embodiment 9 have the effects the same as inEmbodiment 3. In addition, the rotational position of rotary member 960can be accurately detected in Embodiment 9.

Embodiment 10

(Configuration of Fluid Handling Device)

FIGS. 25A to 25C illustrate a configuration of fluid handling device1000 according to Embodiment 10. FIG. 25A is a plan view illustratingthe configuration of fluid handling device 1000, FIG. 25B is a bottomview thereof, and FIG. 25C is a front view thereof. FIGS. 26A to 26Cillustrate a configuration of channel chip 1010 according to Embodiment10. FIG. 26A is a bottom view of channel chip 1010, FIG. 26B is across-sectional view taken along line B-B in FIG. 26A, and FIG. 26C is across-sectional view taken along line C-C in FIG. 26A.

Fluid handling device 1000 according to Embodiment 10 includes channelchip 1010 and rotary member 260. Fluid handling device 1000 according toEmbodiment 10 includes channel chip 1010 whose configuration isdifferent from channel chip 510 according to Embodiment 5, and rotarymember 260 whose configuration is the same as rotary member 260according to Embodiment 2. Therefore, the same reference numerals aregiven to the components the same as those of fluid handling devices 200and 500 according to respective Embodiments 2 and 5, and thedescriptions thereof will be omitted.

Channel chip 1010 includes substrate 1020, film 1030 and cover 1070.

Substrate 1020 has a groove and/or through hole formed therein asappropriate within a range that can obtain the effect of the presentembodiment. The thickness and example materials of substrate 1020 arethe same as those of substrate 120 according to Embodiment 1.

Film 1030 includes fourteen diaphragms 1031. Film 530 is the same asfilm 530 in Embodiment 5 except for the number of diaphragms 1031.Diaphragm 1031 is disposed above partition wall 223 in below describedfirst channel unit 10A₄. Diaphragms 1031 are, except for the positionsthereof on film 1030, the same as diaphragms 131 a to 131 d inEmbodiment 1.

Cover 1070 is disposed on the top surface of substrate 1020. As will bedescribed in detail below, cover 1070 partly covers grooves formed insubstrate 1020, thereby forming pressure-reducing unit 10D andpressure-increasing unit 10E.

The position and size of cover 1070 are not limited, and are set asappropriate within a range that can obtain the effect of the presentembodiment. Cover 1070 covers at least the groove used forpressure-reducing unit 10D and the groove used for pressure-increasingunit 10E. Cover 1070 may be flexible, or rigid. In the presentembodiment, cover 1070 is a flexible film. Examples of the materials ofcover 1070 are the same as those of first film 130 in Embodiment 1.

Channel chip 1010 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 1010 includes fourteen first channel units 10A₁ to 10A₁₄,second housing portion 526, pressure-reducing unit 10D andpressure-increasing unit 10E.

When channel chip 1010 is viewed from the bottom, fourteen first channelunits 10A₁ to 10A₁₄ are disposed radially from second housing portion526 as the center. Fourteen first channel units 10A₁ to 10A₁₄ haveidentical configurations except for the positions of the channel unitsin channel chip 1010. Therefore, only first channel unit 10A₁ isdescribed. First channel unit 10A₁ includes first housing portion 221,first channel 222, partition wall 223 and second channel 224.

Pressure-reducing unit 10D includes pressure-reducing port 1021 andpressure-reducing channel 1022. Pressure-reducing unit 10D is disposedin channel chip 1010 and on the surface opposite to the surface(substrate 1030) having first channel units 10A₁ to 10A₁₄ disposedthereon.

Pressure-reducing port 1021 is an opening that can be connected to apump for reducing the atmospheric pressure inside second housing portion526. Pressure-reducing port 1021 may have any shape or size, and may beappropriately designed as necessary.

Pressure-reducing channel 1022 is disposed between second housingportion 526 and pressure-reducing port 1021. Pressure-reducing channel1022 is connected to second housing portion 526 at one end, and topressure-reducing port 1021 at the other end. Pressure-reducing channel1022 allows second housing portion 526 to communicate with the outside.The cross-sectional area and the cross-sectional shape ofpressure-reducing channel 1022 are not limited, as long as the pressureinside second housing portion 526 can be suitably reduced by using apump or the like.

In the present embodiment, pressure-reducing channel 1022 is composed ofa groove formed in substrate 1020 and cover 1070 blocking the opening ofthe groove. In the present embodiment, cover 1070 has a through holeformed therein at a position corresponding to one end portion of thegroove, and thus cover 1070 does not cover the end portion of thegroove. This forms pressure-reducing port 1021.

Pressure-increasing unit 10E includes pressure-increasing port 1023 andpressure-increasing channel 1024. Pressure-increasing unit 10E isdisposed in channel chip 1010 and on the surface opposite to the surface(substrate 1030) having first channel units 10A₁ to 10A₁₄ disposedthereon.

Pressure-increasing port 1023 is an opening that can be connected to apump for increasing the atmospheric pressure inside second housingportion 526.

Pressure-increasing port 1023 may have any shape or size, and may beappropriately designed as necessary.

Pressure-increasing channel 1024 is disposed between second housingportion 526 and pressure-increasing port 1023. Pressure-increasingchannel 1024 is connected to second housing portion 526 at one end, andto pressure-increasing port 1023 at the other end. Pressure-increasingchannel 1024 allows second housing portion 526 to communicate with theoutside. The cross-sectional area and the cross-sectional shape ofpressure-increasing channel 1024 are not limited, as long as thepressure inside second housing portion 526 can be suitably increased byusing a pump or the like.

In the present embodiment, pressure-increasing channel 1024 may becomposed of a groove formed in substrate 1020 and cover 1070 blockingthe opening of the groove. In the present embodiment, cover 1070 has athrough hole formed therein at a position corresponding to one endportion of the groove, and thus cover 1070 does not cover the endportion of the groove. This forms pressure-increasing port 1023.

(Fluid Handling Method)

Hereinafter, described is an example of a method for handling a fluid byusing fluid handling device 1000 according to Embodiment 10 (fluidhandling method according to Embodiment 10). In the following, a methodis described in which liquids in respective first housing portions 221of first channel units 10A₁ and 10A₂ are each moved to second housingportion 526, and mixed, and then the obtained mixture is moved to firsthousing portion 221 of first channel unit 10A₁₄.

Desired liquids are previously stored in first housing portions 221 offirst channel units 10A₁ and 10A₂, respectively. Rotary member 260 isthen rotated for switching the microvalve in first channel unit 10A₁ tothe first state (valve opened state). In this instance, the microvalvesin respective first channel units 10A₂ to 10A₁₄ are all in the secondstate (valve closed state). During this state, the inside of secondhousing portion 526 is set to a negative pressure by using a suctionpump via pressure-reducing port 1021 and pressure-reducing channel 1022.This enables the liquid stored in first housing portion 221 of firstchannel unit 10A₁ to move to second housing portion 526.

The amount of the liquid to be moved to second housing portion 526 maybe adjusted as appropriate in accordance with the atmospheric pressureto be reduced inside second housing portion 526. For preventing thesuction pump from sucking the liquid, the amount of the liquid to beintroduced into second housing portion 526 can be adjusted in such a waythat the liquid does not reach the opening of pressure-reducing channel1022 that is opened to second housing portion 526.

Rotary member 260 is then further rotated for switching the microvalvein first channel unit 10A₂ to the first state (valve opened state). Inthis instance, the microvalves in respective first channel units 10A₁and 10A₃ to 10A₁₄ are all in the second state (valve closed state).During this state, the inside of second housing portion 526 is set to anegative pressure in the same manner as in the above procedure, therebymoving the liquid stored in first housing portion 221 of first channelunit 10A₂ to second housing portion 526. This can mix the liquid fromfirst channel unit 10A₁ with and the liquid from first channel unit 10A₂in second housing portion 526.

Rotary member 260 is then further rotated for switching the microvalvein first channel unit 10A₁₄ to the first state (valve opened state). Inthis instance, the microvalves in respective first channel units 10A₁ to10A₁₃ are all in the second state (valve closed state). During thisstate, the inside of second housing portion 526 is set to a positivepressure by using a pressure pump via pressure-increasing port 1023 andpressure-increasing channel 1024. This enables the liquid stored insecond housing portion 526 to move to first housing portion 221 of firstchannel unit 10A₁₄.

As described above, Embodiment 10 enables suitable movement of fluids byadjusting the atmospheric pressure inside second housing portion 526, aswell as by switching between the first state and the second state.

The fluid handling method according to Embodiment 10 is not limited tothe above described mode. For example, three or more liquids may bemixed. PCR reaction may be performed by setting the insides of firsthousing portions to different temperatures, and then moving fluidsbetween the first housing portions that have different temperatures.Fluid handling device 1000 according to Embodiment 10 may be, forexample, suitably used for extraction and purification of DNA, and thelike.

(Effect)

Channel chip 1010, fluid handling device 1010 and the fluid handlingmethod according to Embodiment 10 have the effects the same as inEmbodiment 1. In addition, fluids can be suitably moved in accordancewith the atmospheric pressure inside second housing portion 526 inEmbodiment 10.

Embodiment 11

FIGS. 27A to 27C illustrate a configuration of channel chip 1110according to Embodiment 11. FIG. 27A is a bottom view of channel chip1110, FIG. 27B is a cross-sectional view taken along line B-B in FIG.27A, and FIG. 27C is a cross-sectional view taken along line C-C in FIG.27A.

A fluid handling device according to Embodiment 11 includes channel chip1110 and a rotary member (not illustrated). Some of the components ofthe fluid handling device according to Embodiment 11 are the same asthose of fluid handling device 200 according to Embodiment 2. Therefore,the same reference numerals are given to the components the same asthose of fluid handling device 200 according to Embodiment 2, and thedescriptions thereof will be omitted.

Channel chip 1110 includes substrate 1120 and film 1130. Substrate 1120has a groove and/or through hole formed therein as appropriate within arange that can obtain the effect of the present embodiment. Thethickness and example materials of substrate 1120 are the same as thoseof substrate 120 according to Embodiment 1.

Film 1130 includes three diaphragms 231 and one diaphragm 1132 forpumping. Film 1130 is the same as film 230 in Embodiment 2 except thatfilm 1130 further includes diaphragm 1132 for pumping.

Diaphragm 1132 for pumping, which is a portion of film 1130, protrudesaway from substrate 1120, and is not joined to substrate 1120. Diaphragm1132 for pumping is bendable toward substrate 1120 when pressed by aprotrusion for pumping (described below) formed on a rotary memberaccording to Embodiment 11.

Diaphragm 1132 for pumping functions, along with the protrusion forpumping, as a pump for moving a fluid in a channel of the fluid handlingdevice according to Embodiment 11. Specifically, while the protrusionfor pumping presses film 1130, the protrusion for pumping is moved alongthe extending direction of diaphragm 1132 for pumping so that a part ofdiaphragm 1132 for pumping adheres to the surface of substrate 1120.This movement changes the atmospheric pressure inside the channel,thereby moving the fluid.

The cross-sectional shape and the shape in plan view of diaphragm 1132for pumping are not limited as long as the above function can beachieved. For example, the cross-sectional shape (i.e., a shape on thecross section orthogonal to the flow direction of a fluid) of diaphragm1132 for pumping is semicircular. Diaphragm 1132 for pumping is, forexample, in the shape of an arc in plan view when channel chip 1110 isviewed from the bottom.

The distance (maximum distance) between diaphragm 1132 for pumping andsubstrate 1120 may be adjusted as appropriate, for example, from theview point of the flow rate of a desired fluid, and how well diaphragm1132 for pumping can adhere to substrate 1110. A longer distance enablesa more amount of a fluid moving through the gap between diaphragm 1132for pumping and substrate 1120, and a shorter distance enables easieradhesion of diaphragm 1132 for pumping to substrate 1120.

Channel chip 1110 includes channels for running a fluid therethrough,such as a reagent, liquid sample, gas or powder. More specifically,channel chip 1110 includes three first channel units 2A₁ to 2A₃ and onefifth channel unit 11F.

Fifth channel unit 11F includes third channel 1125, fifth channel 1128,sixth channel 1129, and second housing portion 1126. Channel chip 1110is the same as channel chip 210 according to Embodiment 2 except thatchannel chip 1110 further includes fifth channel unit 11F.

Third channel 1125 allows a fluid to move therein. The upstream end ofthird channel 1125 is connected to the downstream ends of secondchannels 224 in respective three first channel units 2A₁ to 2A₃. Thedownstream end of third channel 1125 is connected to the upstream end offifth channel 1128. The cross-sectional area and cross-sectional shapeof third channel 1125 are the same as those of first channel 122 aaccording to Embodiment 1, respectively. In the present embodiment,third channel 1125 includes a widened part having a largercross-sectional area than other parts of third channel 1125. Thecross-sectional area of the widened part is not limited, and may beadjusted in accordance with the use.

Fifth channel 1128 allows a fluid to move therein. The upstream end offifth channel 1128 is connected to the downstream end of third channel1125. The downstream end of fifth channel 1128 is connected to theupstream end of sixth channel 1129. Fifth channel 1128 is a space formedbetween substrate 1120 and diaphragm 1132 for pumping. Thecross-sectional area and cross-sectional shape of fifth channel 1128 maybe determined in accordance with the shape and size of diaphragm 1132for pumping.

Sixth channel 1129 allows a fluid to move therein. The upstream end ofsixth channel 1129 is connected to the downstream end of fifth channel1128. The downstream end of sixth channel 1129 is connected to secondhousing portion 1126. In the present embodiment, sixth channel 1129 maybe composed of a groove formed in substrate 1120 and film 1130 blockingthe opening of the groove. The cross-sectional area and cross-sectionalshape of sixth channel 1129 are the same as those of first channel 122 aaccording to Embodiment 1, respectively.

Second housing portion 1126 is, except for the position thereof in thefluid handling device according to Embodiment 11, the same as secondhousing portion 526 in Embodiment 5.

The rotary member according to Embodiment 11 includes protrusion 261 andthe protrusion for pumping. The rotary member may have any configurationwithin a range that can obtain the effect of the present embodiment, andmay be appropriately designed as necessary. For example, the rotarymember according to Embodiment 11 may be composed of a first memberincluding protrusion 261, and a second member including the protrusionfor pumping, or composed of one member including protrusion 261 and theprotrusion for pumping. When the rotary member is composed of twomembers (the first and second members), the two members may rotate incoordination, or may independently rotate.

The protrusion for pumping is disposed on the underside (bottom surface)of the rotary member according to Embodiment 11. The shape, size andposition of the protrusion for pumping are not limited, as long as theprotrusion for pumping can contact film 1130 so that a part of diaphragm1132 for pumping adheres to substrate 1120. Examples of the shapes ofthe protrusion for pumping include shapes of cylinders and polygonalprisms. For suitably adhering diaphragm 1132 for pumping to substrate1120, the width of a surface where the protrusion for pumping contactsfilm 1130 is preferably longer than the width of diaphragm 1132 forpumping in the width direction of diaphragm 1132 for pumping (directionperpendicular to the fluid flow direction).

The rotary member may have a handle for gripping the rotary member asnecessary. The rotary member may be held by a positioning section forpositioning the rotary member so that the rotary member can rotate.

A fluid handling method according to Embodiment 11 is the same as thefluid handling method according to Embodiment 2 except that a fluid ismoved by using diaphragm 1132 for pumping. For example, when one of themicrovalves of respective first channel units 2A₁ to 2A₃ is in the firststate, the method of Embodiment 11 moves the protrusion for pumpingalong the extending direction of diaphragm 1132 for pumping while theprotrusion for pumping contacts film 1130 so that a part of diaphragm1132 for pumping adheres to substrate 1110. This enables suitablemovement of a fluid between first housing portion 221 and second housingportion 1126. The fluid may move from first housing portion 221 tosecond housing portion 1126, and vice versa. Where the fluid moves to isdetermined in accordance with the moving direction of the protrusion forpumping.

(Effect)

Channel chip 1110, the fluid handling device and the fluid handlingmethod according to Embodiment 11 have the effects the same as inEmbodiment 2. In addition, there is no need to independently prepare apump for sending liquid in Embodiment 11.

The channel chip according to the present invention is not limited tothe above described mode. The channel chip may be, for example,hydrophilized as necessary. For example, the inner surfaces of the firsthousing portion and the first channel may be hydrophilized. Suchtreatment enables the movement of a liquid stored in the first housingportion by capillarity, thereby filling the first channel with theliquid. As a result, entering of air bubbles into the channel can beprevented in the subsequent steps. Any method may be selected frommethods known in the art as appropriate for hydrophilizing.

INDUSTRIAL APPLICABILITY

The fluid handling device of the present invention is particularlyadvantageous, for example, as a microchannel chip used in a medicalfield.

REFERENCE SIGNS LIST

-   10 Fluid-   100, 200, 500, 700, 900, 1000 Fluid handling device-   110, 210, 310, 410, 510, 710, 810, 910, 1010, 1110 Channel chip-   120, 220, 320, 420, 520, 720, 820, 1020, 1120 Substrate-   121 a, 121 b Fluid inlet-   221 First housing portion-   122 a, 122 b, 222 First channel-   123 a, 123 b, 223 (First) Partition wall-   124, 224 Second channel-   125 a, 125 b Second partition wall-   126 a, 126 b, 225, 325, 425, 1125 Third channel-   226, 526, 1126 Second housing portion-   127 a, 127 b Fluid outlet-   827 Fourth channel-   1128 Fifth channel-   1129 Sixth channel-   130, 230, 430, 530, 730, 830, 1030, 1130 (First) Film-   131 a to 131 d, 231, 431, 531, 731, 831, 1031 Diaphragm-   1132 Diaphragm for pumping-   140 Positioning section-   141 Step-   150 Second film-   160, 260, 560, 660, 760, 960 Rotary member-   161 a, 161 b, 261, 561, 661 Protrusion-   761 a First protrusion-   761 b Second protrusion-   162, 262, 562 a to 562 f, 662 a to 662 c, 762 a to 762 e Notch-   163 Handle-   963 Second electrode-   940 First electrode-   1070 Cover-   2A₁ to 2A₃, 3A₁ to 3A₃, 4A₁ to 4A₃, 5A₄, 7A₄, 10A₁ to 10A₁₄ First    channel unit-   2B, 3B, 4B Second channel unit-   8C₁ to 8C₃ Third channel unit-   10D Pressure-reducing unit-   1021 Pressure-reducing port-   1022 Pressure-reducing channel-   10E Pressure-increasing unit-   1023 Pressure-increasing port-   1024 Pressure-increasing channel-   11F Fifth channel unit

1. A channel chip having a channel for running a fluid that is openedand closed by sliding on a film a sliding member slidable on the filmwhile contacting with the film, the channel chip comprising: a substrateincluding a first channel, a second channel and a partition wall formedbetween the first channel and the second channel; a film including adiaphragm having a substantially spherical crown shape, the film beingdisposed on the substrate so that the diaphragm faces the partitionwall; and a positioning section for holding the sliding member in such away that the sliding member is slidable on the film while thepositioning section positions the sliding member, the positioningsection being disposed on the film.
 2. The channel chip according toclaim 1, wherein the sliding member is a rotary member which isrotatable.
 3. The channel chip according to claim 1, wherein thepositioning section is a frame for holding the sliding member in such away that the sliding member is slidable on the film.